A high-precision, template-assisted, anisotropic wet etching method for fabricating perovskite microstructure arrays

Wet anisotropic etching of polyimide

With the aim of developing flexible biocompatible implants for in vivo studies of nerve regeneration [1], fabrication of passive polyimide membranes using the commercial available Kapton film (100HN and 50HN, from DuPont) was investigated. Polyimide has been widely used in microelectronics, and its application possibilities have been widening to other fields such as micromachining and biomedica...

Wet anisotropic etching for fluidic 1D nanochannels

In this paper a method is proposed to fabricate channels for fluidic applications with a depth in the nanometer range. Channels with smooth and straight sidewalls are constructed with the help of micromachining technology by etching shallow trenches into 〈110〉 silicon using native oxide as a mask material and OPD resist developer as the etchant. Sub-50 nm deep fluidic channels are formed after ...

Advanced Surfactant-Modified Wet Anisotropic Etching

In the area of Micro Electro Mechanical Systems (MEMS), bulk micromachining and surface micromachining are two main technologies. Bulk micromachining defines structures by selectively etching inside a substrate while surface micromachining uses a succession of thin film deposition and selective etching on top of a substrate. The two technologies are quite different, resulting in different dimen...

Orientation-dependent nanostructure arrays based on anisotropic silicon wet-etching for repeatable surface-enhanced Raman scattering.

Repeatable fabrication of sensitive plasmonic substrates through a simple procedure has become a major challenge for SERS-based sensing and imaging. Herein, a new class of high-performance SERS substrates, including pyramid, ridged-hexagon, and quasi-triangle nanostructures, is successfully fabricated based on the nanosphere lithography technique and anisotropic wet etching. Using the wafer-sca...

Combined Wet and Dry Etching for High-Precision Silicon Photonic Bandgap Devices